EX5D
HIGH POWER INDUSTRIAL 40w MIN LASER
up TO 35w STABILIZED
EX5D SPECIFICATIONS
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
3
24
40
20
15
Average Power W @250Hz
0.8
6
10
5
4
Average Power W @500Hz
1.5
12
20
10
7
Average Power W @ 1000
3
24
40
20
15
Repetition Rate, Hz
250/500/1000/2000
Energy 2000 Hz Max. mJ
1.5
10
14
10
7.5
Average power W @ 2000Hz
3
20
28
20
15
Dynamic gas lifetime to 50% energy
billion PULSES WITH AUTOFILL
Stabilized power W
2
20
35
15
10
Pulse Length, ns
8-12
Beam Size, mm
3 X 6
Stability
<2% Standard Deviation
Tube Service
2-6 Billion Pulses
Divergence, mRad full angle
0.8 X 1.5
Cooling
Air/Water
Window Service
1000E6
1000E6
>1000E6
200E6
300E6
up TO 35w STABILIZED
Features
Saturable magnetic switching
soft corona PREIONIZATION
Arc free discharge
Stabilized energy output
Long gas lifetime
Billions of pulses
High Power
Rep rate to 2000 Hz
AUTO GAS FILL ON MULTIPLE TRIGGERS
low DIVERGENCE
AIR COOLED
商品属性 [波长] 157/193/248/308/351nm [脉宽] 8-12ns [重复频率] 250/500/1000/2000Hz