EX5A
Industrial MINI LASER SYSTEM
The EX5A offers high performance in a compact mini excimer laser. System lifetime is greatly extended, energy output and average power levels are higher than the standard EX5 unit.
The EX5A is recommended for industrial and rough service applications where high duty cycle and minimal maintenance is required.
Repetition rates to 2000Hz 2 year warranty
EX5A/1000/2000
EX5A Specifications
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
1.5/2.5*
14
20
12
8
Peak Power MW
0.30
2.0
2.5
1.25
0.8
Average Power W @ 250Hz
0.3/0.4
3.0
5.0
2.5
1.4
Average Power W @ 500Hz
0.5
6.0
8.0
4.0
2.5
Average Power W @ 1000Hz
1.0
9
14
6.0
5.0
Energy 2000 Hz Max. mJ
0.7
0.9
Average power W @ 2000Hz
1.0
1.4
Dynamic gas lifetime Pulses to 50% energy
10E6
12E6
18E6
20E6
15E6
Shelf life to 50% energy
10 days
15 days
30 days
>2 Months
30 Days
Pulse Length nS
8-10
Stability
<2% Standard Deviation
Tube Service
5 Billion of Pulses
Beam Size, mm
3X 6
Divergence, mRad full angle
1 X 2
Cooling
Air/Water
Timing Jitter
2nS Standard Deviation
Weight
15kg 250/500Hz, 35kg 1000/2000Hz
商品属性 [波长] 157/193/248/308/351nm [脉宽] 8-10nm [峰值功率] 0.3/2.0/2.5/1.25/0.8MW