Lasers for Microelectronics Applications (SE-Version)
THE ULTIMATE IN EXCIMER LASER TECHNOLOGY
Semiconductor processing, mask inspection, microlithography and metrology lasers are available which meet CE mark and SEMI S2 standards. All semiconductor excimer lasers use the latest total metal/ceramic technology for maximum laser lifetime with minimal service. SE-version excimer lasers feature clean room packaging, longer chamber lifetimes and longer gas lifetimes than standard excimer lasers.
SE-Version Features
10 Billion pulse system lifetime
Guaranteed <1% stability
200 Million pulses on a single ArF 193nm gas fill
Hard anodize clean room package
Meets SEMI S2 standards
The EX10SE Semiconductor Excimer Laser
SE Versions are available for EX10, EX50, EX100 and EX100H products.
EX10SE specifications
PARAMETER
F2
ArF
KrF
XeCl
XeF
Wavelength nm
157
193
248
308
351
Energy Max. mJ
3
20
35
15
15
Energy Control Range mJ
1-3
5-20
10-35
7-15
7-15
Max. Stabilized Energy 200Hz
2.5
15
30
15
12
Average power Max. W 300/600
0.6/1.2
4/7
6/12
3/6
3/6
Stability standard deviation
< 1% at max. repetition rate
Repetition Rate, Hz
300/600/1000
Dynamic gas lifetime
200E6
200E6
500E6
100E6
300E6
Static Gas Life to 50% energy
15 days
60 days
90 days
>1 Year
90 days
Pulse Length, ns
12-15
Beam Size, mm
5X 3
8 X 3
Divergence, mRad full angle
1 X 2
Cooling
Air
Optics Service
500E6
300E6
1000E6
100E6
300E6
商品属性 [波长] 157/193/248/308/351nm [脉宽] 12-15ns [重复频率] 300/600/1000Hz