Nano-P Series
Features
Compact tubular piezo nanopositioner
True flexure guided motion
Position sensors, closed loop control
Up to 70 μm motion
Invar and titanium construction
Closed loop control
Typical Applications
Single axis positioning
Surface analysis
Metrology
Product Description
The Nano-P Series are piezo actuated, closed loop, linear nanopositioners that incorporate a unique flexure hinge design. The flexure hinge is machined entirely from a single block of high strength titanium using an advanced electrical discharge machining process. This hinge, available for the first time on a tubular piezo nanopositioner, ensures the highest degree of repeatability and load capability. Unlike similar looking products on the market, the Nano-P Series does not have internal Belleville springs. Belleville springs are not frictionless and therefore cannot provide the high degree of repeatability of a true nanopositioner. The guiding mechanism of the Nano-P Series is a true flexure spring - eliminating mechanical friction and stiction. The Nano-P Series is constructed from invar and titanium for the best combination of thermal stability and mechanical strength, making it ideal for the most demanding nanopositioning and metrology applications. The Nano-P Series is available in three standard ranges of motion with integrated position sensors utilizing proprietary PicoQ® technology to provide absolute, repeatable position measurement with picometer accuracy under closed loop control. Custom systems available.
Noise Plots - Nano-P15
Test Data - Nano-P35
The Nano-P35 closed-loop response to a 3nm peak-to-peak square wave input signal, measured with USB digital interface. Notice the ultra-low, sub-nanometer stability of the system over the time scale. Similar products offered by other companies are unable to achieve such low-noise results. The Nano-P uses a true flexure guiding mechanism and low-noise sensors to achieve high-resolution positioning.
Technical Specifications
Range of motion (Nano-P15)
15 μm
Range of motion (Nano-P35)
35 μm
Range of motion (Nano-P70)
70 μm
Resolution (15/35/70 μm)
0.03/0.07/0.14 nm
Resonant Frequency
2.5 kHz ±20%
Recommended max. load*
0.2 kg
Body Material
Invar and Titanium
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-P Series Drawing
商品属性 [行程] 70 μm [负载] 0.2 kg [分辨率] 0.14nm