Nano-LR200
Features
Long range single axis piezo nanopositioner
Less than 5 nm out of plane motion
Low profile design
Closed loop control
Typical Applications
Surface metrology
Wafer scanning and alignment
Optical alignment
Product Description
The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS.
Technical Specifications
Range of motion (X)
200 μm
Resolution
0.4 nm
Resonant Frequency
500 Hz ±20%
Resonant Frequency (100g load)
200 Hz ±20%
Stiffness
0.2 N/μm
θ roll, θ pitch (typical)
≤0.3 μrad
θ yaw (typical)
≤0.3 μrad
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.2 kg
Body Material
Al
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-LR200 Drawing
商品属性 [行程] 200 μm [刚性] 0.2 N/μm [负载] 0.5 kg [分辨率] 0.4 nm