Nano-CZ200
Features
Single axis (Z) piezo nanopositioner
Long range motion - 200μm
Compact size
Closed loop control
Typical Applications
Precision optical alignment and mirror positioning
High resolution probe positioning
Metrology
Product Description
The Nano-CZ200 is a compact, long range, single axis (Z-axis) precision piezo nanopositioning system. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with sub-nanometer resolution under closed loop control. An optional center aperture up to 0.25 inches in diameter (not shown in the picture) can be provided for applications which require an optical pathway through the stage. The Nano-CZ200 can be operated in any orientation and is ideally suited for precision alignment of optical elements or other components with limited size and weight.
Technical Specifications
Range of motion (Z)
200 μm
Resolution
0.4 nm
Resonant Frequency
500 Hz ±20%
Stiffness
1.0 N/μm
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.1 kg
Body Material
Aluminum
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-CZ200 Drawing
商品属性 [行程] 200 μm [刚性] 1.0 N/μm [负载] 0.1 kg [分辨率] 0.4 nm