Nano-CZ500
Features
Single axis (Z) piezo nanopositioner
Long range motion - 500μm
Compact size
Closed loop control
Typical Applications
Precision optical alignment and mirror positioning
High resolution probe positioning
Metrology
Product Description
The Nano-CZ500 is a compact, long range, single axis (Z-axis) precision piezo nanopositioning system. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with nanometer resolution under closed loop control. An optional center aperture up to 0.5 inches in diameter provides an optical pathway through the stage. The Nano-CZ500 can be operated in any orientation and is well suited for static alignment and moderate speed, long range scanning applications.
Technical Specifications
Range of motion (Z)
500 μm
Resolution
1.0 nm
Resonant Frequency
200 Hz ±20%
Stiffness
1.0 N/μm
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.1 kg
Body Material
Aluminum
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-CZ500 Drawing
商品属性 [行程] 500 μm [刚性] 1.0 N/μm [负载] 0.5 kg [分辨率] 1.0 nm