Nano-HS Series
Features
High speed, multi-axis piezo nanopositioner
XY and XYZ configurations
Z-axis step response time down to 2ms
Z-axis scans up to 300 Hz
Closed loop control
Picometer positioning resolution
High stability
Typical Applications
High speed, high resolution positioning
Metrology
AFM
SPM
Product Description
The Nano-HS Series is a high speed, multi-axis, precision piezo nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano-HS can be configured to provide XY or XYZ motion. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 5kHz make it ideal for metrology applications that require noise floors less than 10 picometers and/or high speed performance. The Nano-HS2 is an ideal high speed XY scanning stage for use with the MadPLL® system. See the SPM-M Kit for an example of how to combine Mad City Labs equipment to build an AFM or NSOM. For an XYZ system with even higher speed Z, see the Nano-HS3M.
Technical Specifications
Range of motion (XYZ)
10 μm
Resolution
0.01 nm
XY (HS2) Resonant Frequency
1.5 kHz ±20%
XY (HS3) Resonant Frequency
1.0 kHz ±20%
Z (HS3) Resonant Frequency
5.0 kHz ±20%
Scanning Speed
up to 300 Hz
Stiffness (Z-axis)
8 N/μm
Recommended max. load (horizontal)*
0.1 kg
Recommended max. load (vertical)*
0.1 kg
Body Material
Al, Invar or Titanium
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Position Noise Spectrum
The Nano-HS Series demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis.
X-Axis
Y-Axis
Z-Axis
Nano-HS2 Drawing
Nano-HS3 Drawing
商品属性 [行程] 10 μm [刚性] 8 N/μm [负载] 0.1 kg [分辨率] 0.01 nm