Nano-M250
Features
Compact piezo nanopositioner
Two axis motion
50 μm x 50 μm ranges of motion
Closed loop control
Typical Applications
Alignment
Nanolithography
Scanning microscopy
Product Description
The Nano-M250 is a compact, two axis piezo nanopositioning system constructed from aluminum. The small dimensions of the Nano-M250 allow it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M250 is also available in high vacuum and ultra high vacuum compatible models. Custom modifications, including range of motion, are available. Contact your local sales office for more information.
Technical Specifications
Range of motion (XY)
50 μm x 50 μm
Resolution
0.1 nm
Resonant Frequency (X)
370 Hz ±20%
Resonant Frequency (Y)
300 Hz ±20%
Stiffness
1.0 N/μm
θ roll, θ pitch (typical)
≤1 μrad
θ yaw (typical)
≤3 μrad
Recommended max. load (horizontal)*
0.5 kg
Recommended max. load (vertical)*
0.2 kg
Body Material
Aluminum
Controller
Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
Nano-M250 Drawing
商品属性 [行程] 50 μm x 50 μm [刚性] 1.0 N/μm [负载] 0.5kg [分辨率] 0.1nm