Optromix - CLS-7500
KEY FEATURES
Narrow linewidth excimer laser MOPA design – Master Oscillator & Power Amplifier Wavelength tuning
Specifications
Parameter
ArF
KrF
Wavelength (cm)
193
248
Linewidth (pm)
<3
Maximum repetition rate (Hz)
CL 7520
CL 7550
20
50
Pulse duration (ns)
~20
Stability of pulse energy (sigma, %)
< 2
Beam size (V x H, mm)
20 x 6
Beam divergency (FWHM, V x H, mm)
< 0.2
Spatial coherence (mm)
> 5
Temporal coherence (mm)
> 10
Nominal Pulse Energy (mJ)
100
250
Jitter (ns)
< 2
Electrical / Mechanical / Environmental
Parameter
Optromix-CLS 7500
Cooling
water < 3 liter/min
Dimensions (L x W x H, mm)
2000 x 800 x 747
Gas
1 premix cylinder
Power consumption
380/220V, 50Hz,7kW
Control
RS 232, Windows
Warranty: Standard Warranty - 12 months from the date of delivery.
商品属性 [波长] 193/248nm